| Dynamics Research Corp./Metrigraphics Division Press Release |  |
Metrigraphics Applies Electroforming Technology to Fabrication of Micro-Coils
The Metrigraphics Division of Dynamics Research Corp. has applied it's proprietary electroforming technology to the fabrication of ultra-high density micro-coils. Inductive coils are being used for sensing applications in a wide range of life sciences instrumentation or in medical implants. In applications where very small size is required, Metrigraphics can fabricate micro-coils with conductor line widths and spaces between conductors as small as 5 microns (0.0002").
The attached scanning electron microscope (SEM) image shows a micro-coil on a glass substrate. The center pad is 100 microns (0.004") square. The conductor width is 10 microns (0.0004"), and the space between the conductor is also 10 microns. The height of the conductor is 25 microns (0.001"), giving a 2.5:1 aspect ratio. Higher aspect ratios up to 5:1 are possible. The dimensional tolerance is better than a micron. As seen in the SEM image, the micro-coil has sharp corners and vertical walls and flat top surfaces.
Conductors can also be fabricated on a variety of other substrates. Flexible polyimide material is very popular. We can fabricate multi-layer circuits and micro-coils. Micro-vias as small as 25 microns (0.001") interconnect the different layers. For further information on our micro-circuit and micro-coil capabilities visit us on the web at http://www.drc.com/metrigraphics/circuits.htm
