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MKS Instruments Inc.

2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: 978-975-2350
Fax: 978-975-0093

E-mail: mks@mksinst.com

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Description:
Provides instruments, subsystems, and process control systems that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes. Products are derived from core competencies in pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, control and information technology, power and reactive gas generation, and vacuum technology.

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